Correlation Between Lattice Strain and Energy Gap Bowing of AlxGa1-xN Epitaxial Thin Films

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	Correlation Between Lattice Strain and Energy Gap Bowing of AlxGa1-xN Epitaxial Thin Films
	Zhao L; Lu ZX; Cheng CJ; Zhao DG; Zhu JJ; Sun BJ; Qu B; Zhang XF; Sun WG; Zhao, L, Luoyang Optoelect Inst, Luoyang, Peoples R China.
	2009
Conference Name	International Materials Research Conference
Source Publication	MATERIALS RESEARCH
Pages	PTS 1 AND 2,610-613,: 598-603 Part 1-2
Conference Date	JUN 09-12, 2008
Conference Place	Chongqing, PEOPLES R CHINA
Publication Place	LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND
Publisher	TRANS TECH PUBLICATIONS LTD
ISSN	0255-5476
metadata_83	[zhao, lan; lu, zhengxiong; cheng, caijing; zhang, xiangfeng; sun, weiguo] luoyang optoelect inst, luoyang, peoples r china; [zhao, degang; zhu, jianjun; sun, baojuan] chinese acad sci, inst semicond, beijing 100083, peoples r china; [qu, bo] jordan valley semicond uk ltd, durham, england
Abstract	The correlation between the energy band-gap of AlxGa1-xN epitaxial thin films and lattice strain was investigated using both High Resolution X-ray Diffraction (HRXRD) and Spectroscopic Ellipsometry (SE). The Al fraction, lattice relaxation, and elastic lattice strain were determined for all AlxGa1-xN epilayers, and the energy gap as well. Given the type of intermediate layer, a correlation trend was found between energy band-gap bowing parameter and lattice mismatch, the higher the lattice mismatch is, the smaller the bowing parameter (b) will be.
Keyword	Alxga1-xn
Subject Area	半导体材料
Funding Organization	Mat Res Soc.; Chinese Mat Res Soc.
Indexed By	其他
Language	英语
Document Type	会议论文
Identifier	http://ir.semi.ac.cn/handle/172111/8312
Collection	中国科学院半导体研究所（2009年前）
Corresponding Author	Zhao, L, Luoyang Optoelect Inst, Luoyang, Peoples R China.
Recommended Citation GB/T 7714	Zhao L,Lu ZX,Cheng CJ,et al. Correlation Between Lattice Strain and Energy Gap Bowing of AlxGa1-xN Epitaxial Thin Films[C]. LAUBLSRUTISTR 24, CH-8717 STAFA-ZURICH, SWITZERLAND:TRANS TECH PUBLICATIONS LTD,2009:PTS 1 AND 2,610-613,: 598-603 Part 1-2.

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