MoO3 三元复合材料的 MEMS NH3 气体传感器的制备及性能优化研究

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	MoO3 三元复合材料的 MEMS NH3 气体传感器的制备及性能优化研究
	刘佳慧
Subtype	硕士
	2024-05
Degree Grantor	中国科学院大学
Place of Conferral	中国科学院半导体研究所
Language	中文
Date Available	2024-06
Document Type	学位论文
Identifier	http://ir.semi.ac.cn/handle/172111/31839
Collection	中国科学院半导体研究所
Recommended Citation GB/T 7714	刘佳慧. MoO3 三元复合材料的 MEMS NH3 气体传感器的制备及性能优化研究[D]. 中国科学院半导体研究所. 中国科学院大学,2024.

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