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用于微纳米材料热电性能测量的微悬空结构研究
魏江涛
Subtype硕士
2021-06
Degree Grantor中国科学院大学
Place of Conferral中国科学院半导体研究所
Language中文
Date Available2021-06
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/30262
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
魏江涛. 用于微纳米材料热电性能测量的微悬空结构研究[D]. 中国科学院半导体研究所. 中国科学院大学,2021.
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2021092-公开-硕士-集成中心-魏(5222KB)学位论文 限制开放CC BY-NC-SAApplication Full Text
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