SEMI OpenIR  > 半导体超晶格国家重点实验室
一种半导体光电器件的表面钝化方法
郝宏玥; 王国伟; 向伟; 蒋洞微; 邢军亮; 徐应强; 牛智川
Rights Holder中国科学院半导体所
Date Available2016-09-12
Country中国
Subtype发明
Subject Area半导体物理
Application Date2014-11-21
Application NumberCN201410674271.5
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27455
Collection半导体超晶格国家重点实验室
Recommended Citation
GB/T 7714
郝宏玥,王国伟,向伟,等. 一种半导体光电器件的表面钝化方法.
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