| 气相外延在线清洗装置及方法 | |
| 段瑞飞; 霍自强; 羊建坤; 魏同波 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-02 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2014-07-25 |
| Application Number | CN201410360667.2 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27345 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 段瑞飞,霍自强,羊建坤,等. 气相外延在线清洗装置及方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 气相外延在线清洗装置及方法.pdf（1612KB） | 限制开放 | License | Application Full Text | |||
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