| 悬挂式双面外延生长装置 | |
| 刘兴昉; 刘斌; 闫果果; 王雷; 赵万顺; 张峰; 孙国胜; 曾一平 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-09-02 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2014-08-20 |
| Application Number | CN201410412073.1 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27337 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 刘兴昉,刘斌,闫果果,等. 悬挂式双面外延生长装置. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 悬挂式双面外延生长装置.pdf（907KB） | 限制开放 | License | Application Full Text | |||
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