| 一种光子晶体的制造方法 | |
| 杜泽杰; 段瑞飞 | |
| Rights Holder | 中国科学院半导体所 |
| Date Available | 2016-08-30 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2014-09-01 |
| Application Number | CN201410440446.6 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/27319 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 杜泽杰,段瑞飞. 一种光子晶体的制造方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 一种光子晶体的制造方法.pdf（758KB） | 限制开放 | License | Application Full Text | |||
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