SEMI OpenIR  > 中科院半导体材料科学重点实验室
THz天线阵列的制作方法
梁松; 朱洪亮
Rights Holder中国科学院半导体所
Date Available2016-08-30
Country中国
Subtype发明
Subject Area半导体材料
Application Date2014-08-20
Application NumberCN201410412325.0
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/27296
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
梁松,朱洪亮. THz天线阵列的制作方法.
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