| 蓝宝石图形衬底的制备方法 | |
| 段瑞飞; 季安; 伊晓燕; 王莉; 樊中朝; 郭金霞; 潘岭峰; 黄亚军; 赵冀; 李镇 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2013-07-24 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2013-04-22 |
| Application Number | CN201310141878.2 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25644 |
| Collection | 中科院半导体照明研发中心 |
| Recommended Citation GB/T 7714 | 段瑞飞,季安,伊晓燕,等. 蓝宝石图形衬底的制备方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 蓝宝石图形衬底的制备方法.pdf（1025KB） | 限制开放 | License | Application Full Text | |||
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