确定光斑位置的夹具 | |
井红旗; 李全宁; 吴霞; 王翠鸾; 董为; 马骁宇 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2014-03-19 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体器件 |
Application Date | 2013-12-18 |
Application Number | CN201310698513.X |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25462 |
Collection | 光电子器件国家工程中心 |
Recommended Citation GB/T 7714 | 井红旗,李全宁,吴霞,等. 确定光斑位置的夹具. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
确定光斑位置的夹具.pdf(281KB) | 限制开放 | License | Application Full Text |
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