| 激光加工罩 | |
| 张玲; 林学春; 赵伟芳; 伊肖静; 侯玮; 于海娟 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2014-03-05 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2013-11-21 |
| Application Number | CN201310594538.5 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25448 |
| Collection | 全固态光源实验室 |
| Recommended Citation GB/T 7714 | 张玲,林学春,赵伟芳,等. 激光加工罩. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 激光加工罩.pdf（269KB） | 限制开放 | License | Application Full Text | |||
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