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一种用于泡生法蓝宝石晶体炉的多层结构内隔热屏 | |
承刚; 李京波; 李永涛; 董珊 | |
Rights Holder | 中国科学院半导体研究所 |
Date Available | 2012-09-26 |
Country | 中国 |
Subtype | 发明 |
Subject Area | 半导体物理 |
Application Date | 2012-06-14 |
Application Number | CN201210196897.0 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/25407 |
Collection | 半导体超晶格国家重点实验室 |
Recommended Citation GB/T 7714 | 承刚,李京波,李永涛,等. 一种用于泡生法蓝宝石晶体炉的多层结构内隔热屏. |
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一种用于泡生法蓝宝石晶体炉的多层结构内隔(308KB) | 限制开放 | License | Application Full Text |
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