| 一种激光脉冲电镀系统 | |
| 杨盈莹; 林学春; 于海娟 | |
| Rights Holder | 中国科学院半导体研究所 |
| Date Available | 2012-12-12 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体器件 |
| Application Date | 2012-09-14 |
| Application Number | CN201210342253.8 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25207 |
| Collection | 全固态光源实验室 |
| Recommended Citation GB/T 7714 | 杨盈莹,林学春,于海娟. 一种激光脉冲电镀系统. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 一种激光脉冲电镀系统.pdf（605KB） | 限制开放 | License | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment