SEMI OpenIR  > 中科院半导体材料科学重点实验室
4H-SiC肖特基二极管的设计与研制及4H-SiC/SiO2界面研究
郑柳
Subtype博士
Thesis Advisor孙国胜
2014-05-29
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Keyword4h-sic 肖特基二极管 双阻终端扩展 欧姆接触 可靠性 Tmbs 4h-sic/sio2界面
Date Available2014-06-05
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/25125
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
郑柳. 4H-SiC肖特基二极管的设计与研制及4H-SiC/SiO2界面研究[D]. 北京. 中国科学院研究生院,2014.
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