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硫系元素过饱和掺杂硅材料及其器件制备中的关键技术研究
李辛毅
Subtype博士后
Thesis Advisor韩培德
2012
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Subject Area光电子学
Date Available2012-07-10
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23248
Collection集成光电子学国家重点实验室
Recommended Citation
GB/T 7714
李辛毅. 硫系元素过饱和掺杂硅材料及其器件制备中的关键技术研究[D]. 北京. 中国科学院研究生院,2012.
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李辛毅——博士后出站报告(硫系元素过饱和(1550KB) 限制开放LicenseApplication Full Text
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