SEMI OpenIR  > 半导体集成技术工程研究中心
水平全限制相变存储器工艺研发及器件制备研究
付英春
Subtype硕士
Thesis Advisor杨富华 ; 王晓峰
2012
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline集成电路工程
Subject Area微电子学
Date Available2012-06-25
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23180
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
付英春. 水平全限制相变存储器工艺研发及器件制备研究[D]. 北京. 中国科学院研究生院,2012.
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