SEMI OpenIR  > 中科院半导体材料科学重点实验室
超饱和硫掺杂硅材料的激光制备及其光电器件研究
刘德伟
Subtype博士
Thesis Advisor朱洪亮 ; 陈明华
2012
Degree Grantor中国科学院研究生院
Place of Conferral北京
Degree Discipline微电子学与固体电子学
Subject Area半导体材料
Date Available2012-06-18
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23160
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
刘德伟. 超饱和硫掺杂硅材料的激光制备及其光电器件研究[D]. 北京. 中国科学院研究生院,2012.
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