| Stress analysis of silica-based arrayed waveguide grating by a finite element method |
| Deng XQ; Yang QQ; Wang HJ; Hu XW; Wang QM; Deng XQ Chinese Acad Sci Inst Semicond R&D Ctr Optoelect Beijing 100083 Peoples R China.
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| 2002
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| 会议名称 | Photonics Asia Symposium 2002
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| 会议录名称 | MATERIALS, DEVICES, AND SYSTEMS FOR DISPLAY AND LIGHTING, 4918
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| 页码 | 444-447
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| 会议日期 | OCT 14-18, 2002
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| 会议地点 | SHANGHAI, PEOPLES R CHINA
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| 出版地 | 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
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| 出版者 | SPIE-INT SOC OPTICAL ENGINEERING
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| ISSN | 0277-786X
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| ISBN | 0-8194-4707-2
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| 部门归属 | chinese acad sci, inst semicond, r&d ctr optoelect, beijing 100083, peoples r china
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| 摘要 | The stress distribution in silica optical waveguides on silicon is calculated by using finite element method (FEM). The waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. The shift of central wavelength of silica arrayed waveguide grating (AWG) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides. |
| 关键词 | Finite Element Method
Stress
Silica Optical Waveguide On silicOn
Birefringence
Optical Wave-guides
Difference Method
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| 学科领域 | 光电子学
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| 主办者 | SPIE.; Chinese Opt Soc.; Shanghai Jiaotong Univ.; Beijing Inst Technol.; Australian Opt Soc.; Opt Soc Korea.; Opt Soc Japan, Japan Soc Appl Phys.; Opt Soc India.; Optoelect Ind & Technol Dev Assoc.; Optoelect Ind Dev Assoc.; KAPID.; Assoc Photon Ind Dev.; Phonton Ind & Dev Assoc.; Chinese Soc Astronaut.; SPIE Asia-Pacific Chapter.
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| 收录类别 | CPCI-S
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| 语种 | 英语
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| 文献类型 | 会议论文
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| 条目标识符 | http://ir.semi.ac.cn/handle/172111/13701
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| 专题 | 中国科学院半导体研究所（2009年前）
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| 通讯作者 | Deng XQ Chinese Acad Sci Inst Semicond R&D Ctr Optoelect Beijing 100083 Peoples R China. |
推荐引用方式
GB/T 7714 |
Deng XQ,Yang QQ,Wang HJ,et al. Stress analysis of silica-based arrayed waveguide grating by a finite element method[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2002:444-447.
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