Stress analysis of silica-based arrayed waveguide grating by a finite element method

SEMI OpenIR > 中国科学院半导体研究所（2009年前）

	Stress analysis of silica-based arrayed waveguide grating by a finite element method
	Deng XQ; Yang QQ; Wang HJ; Hu XW; Wang QM; Deng XQ Chinese Acad Sci Inst Semicond R&D Ctr Optoelect Beijing 100083 Peoples R China.
	2002
会议名称	Photonics Asia Symposium 2002
会议录名称	MATERIALS, DEVICES, AND SYSTEMS FOR DISPLAY AND LIGHTING, 4918
页码	444-447
会议日期	OCT 14-18, 2002
会议地点	SHANGHAI, PEOPLES R CHINA
出版地	1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA
出版者	SPIE-INT SOC OPTICAL ENGINEERING
ISSN	0277-786X
ISBN	0-8194-4707-2
部门归属	chinese acad sci, inst semicond, r&d ctr optoelect, beijing 100083, peoples r china
摘要	The stress distribution in silica optical waveguides on silicon is calculated by using finite element method (FEM). The waveguides are mainly subjected to compressive stress along the x direction and the z direction, and it is accumulated near the interfaces between the core and cladding layers. The shift of central wavelength of silica arrayed waveguide grating (AWG) on silicon-substrate with the designed wavelength and the polarization dependence are caused by the stress in the silica waveguides.
关键词	Finite Element Method Stress Silica Optical Waveguide On silicOn Birefringence Optical Wave-guides Difference Method
学科领域	光电子学
主办者	SPIE.; Chinese Opt Soc.; Shanghai Jiaotong Univ.; Beijing Inst Technol.; Australian Opt Soc.; Opt Soc Korea.; Opt Soc Japan, Japan Soc Appl Phys.; Opt Soc India.; Optoelect Ind & Technol Dev Assoc.; Optoelect Ind Dev Assoc.; KAPID.; Assoc Photon Ind Dev.; Phonton Ind & Dev Assoc.; Chinese Soc Astronaut.; SPIE Asia-Pacific Chapter.
收录类别	CPCI-S
语种	英语
文献类型	会议论文
条目标识符	http://ir.semi.ac.cn/handle/172111/13701
专题	中国科学院半导体研究所（2009年前）
通讯作者	Deng XQ Chinese Acad Sci Inst Semicond R&D Ctr Optoelect Beijing 100083 Peoples R China.
推荐引用方式 GB/T 7714	Deng XQ,Yang QQ,Wang HJ,et al. Stress analysis of silica-based arrayed waveguide grating by a finite element method[C]. 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA:SPIE-INT SOC OPTICAL ENGINEERING,2002:444-447.

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