Growth of high quality semi-insulating InP single crystal by suppression of compensation defects
Zhao, YW; Dong, ZY; Duan, ML; Sun, WR; Yang, ZX; Zhao, YW, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. 电子邮箱地址: zhaoyw@red.semi.ac.cn
2006
会议名称3rd Asian Conference on Crystal Growth and Crystal Technology (CGCT-3)
会议录名称JOURNAL OF RARE EARTHS
页码24: 75-77 Sp. Iss. SI
会议日期OCT 16-19, 2005
会议地点Beijing, PEOPLES R CHINA
出版地2 XINJIEKOUWAI DAJIE, BEIJING 100088, PEOPLES R CHINA
出版者METALLURGICAL INDUSTRY PRESS
ISSN1002-0721
部门归属chinese acad sci, inst semicond, beijing 100083, peoples r china
摘要Deep level defects in as-grown and annealed SI-InP samples were investigated by thermally stimulated current spectroscopy. Correlations between electrical property, compensation ratio, thermal stability and deep defect concentration in SI-InP were revealed. An optimized crystal growth condition for high quality SI-InP was demonstrated based on the experimental results.
关键词Indium Phosphide
学科领域半导体材料
主办者Chinese Assoc Crystal Growth.; Crystal Mat Shandong Univ, State Key Lab.; CAS, Tech Inst Phys & Chem.; Res Inst Synthet Crystal.; Japanese Soc Promot Sci, 161 Comm.
收录类别其他
语种英语
文献类型会议论文
条目标识符http://ir.semi.ac.cn/handle/172111/10032
专题中国科学院半导体研究所(2009年前)
通讯作者Zhao, YW, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. 电子邮箱地址: zhaoyw@red.semi.ac.cn
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Zhao, YW,Dong, ZY,Duan, ML,et al. Growth of high quality semi-insulating InP single crystal by suppression of compensation defects[C]. 2 XINJIEKOUWAI DAJIE, BEIJING 100088, PEOPLES R CHINA:METALLURGICAL INDUSTRY PRESS,2006:24: 75-77 Sp. Iss. SI.
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