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Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication 期刊论文
Micromachines, 2019, 卷号: 10, 页码: 420
Authors:  Meng Zhang;  Jian Yang;  Yurong He;  Fan Yang;  Yongmei Zhao;  Fen Xue;  Guowei Han;  Chaowei Si;  Jin Ning
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A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors:  Jian Yang;   Meng Zhang;   Yurong He;   Yan Su ;   Guowei Han ;   Chaowei Si ;   Jin Ning;   Fuhua Yang ;   Xiaodong Wang
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A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors:  Jian Yang;   Chaowei Si;   Guowei Han ;   Meng Zhang ;   Jin Ning;   Yongmei Zhao ;   Fuhua Yang;   Xiaodong Wang
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100 Gb/s Silicon Photonic WDM Transmitter with Misalignment-Tolerant Surface-Normal Optical Interfaces 期刊论文
Micromachines, 2019, 卷号: 10, 页码: 336
Authors:  Beiju Huang;   Zanyun Zhang ;   Zan Zhang;   Chuantong Cheng ;   Huang Zhang ;  Hengjie Zhang;  Hongda Chen
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Epitaxy of III-Nitrides on β-Ga2O3 and Its Vertical Structure LEDs 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 5, 页码: 322
Authors:  Weijiang Li;   Xiang Zhang ;   Ruilin Meng ;   Jianchang Yan ;   Junxi Wang ;   Jinmin Li;   Tongbo Wei
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Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 2, 页码: 81
Authors:  Jian Yang ;   Chaowei Si ;   Fan Yang ;   Guowei Han ;   Jin Ning ;   Fuhua Yang ;   Xiaodong Wang
Adobe PDF(1700Kb)  |  Favorite  |  View/Download:87/0  |  Submit date:2019/11/12