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Study on improving the compactness of SiO2 thin film by PECVD 期刊论文
Journal of Synthetic Crystals, 2013, 卷号: 42, 期号: 4, 页码: 577-581
Authors:  GUO Wen-tao,TAN Man-qing,JIAO Jian,GUO Xiao-feng,SUN Ning-ning
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Investigation on deep energy levels formed by sulphur implantation into silicon 期刊论文
Rengong Jingti Xuebao/Journal of Synthetic Crystals, 2012, 卷号: 41, 期号: SUPPL. 1, 页码: 372-375
Authors:  Gao, Li-Peng;  Han, Pei-De;  Mao, Xue;  Fan, Yu-Jie;  Hu, Shao-Xu
Adobe PDF(299Kb)  |  Favorite  |  View/Download:587/154  |  Submit date:2013/04/22