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| Research on the Protrusions Near Silicon-Glass Interface during Cavity Fabrication 期刊论文
Micromachines, 2019, 卷号: 10, 页码: 420
Authors: Meng Zhang; Jian Yang; Yurong He; Fan Yang; Yongmei Zhao; Fen Xue; Guowei Han; Chaowei Si; Jin Ning
 Adobe PDF(8646Kb) |  Favorite | View/Download：19/0 | Submit date：2020/08/05 |
| Research on a 3D Encapsulation Technique for Capacitive MEMS Sensors Based on Through Silicon Via 期刊论文
Sensors, 2019, 卷号: 19, 页码: 93
Authors: Meng Zhang; Jian Yang ; Yurong He ; Fan Yang ; Fuhua Yang ; Guowei Han ; Chaowei Si; Jin Ning
Adobe PDF(3329Kb) | Favorite | View/Download：28/0 | Submit date：2020/08/05 |
| A Resonant Z-Axis Aluminum Nitride Thin-Film Piezoelectric MEMS Accelerometer 期刊论文
Micromachines, 2019, 卷号: 10, 期号: 9, 页码: 589
Authors: Jian Yang; Meng Zhang; Yurong He; Yan Su ; Guowei Han ; Chaowei Si ; Jin Ning; Fuhua Yang ; Xiaodong Wang
Adobe PDF(6047Kb) | Favorite | View/Download：25/0 | Submit date：2020/08/05 |
| A Decoupling Design with T-Shape Structure for the Aluminum Nitride Gyroscope 期刊论文
MICROMACHINES, 2019, 卷号: 10, 页码: 244
Authors: Jian Yang; Chaowei Si; Guowei Han ; Meng Zhang ; Jin Ning; Yongmei Zhao ; Fuhua Yang; Xiaodong Wang
Adobe PDF(5846Kb) | Favorite | View/Download：91/0 | Submit date：2020/08/05 |
| A T-Shape Aluminum Nitride Thin-Film Piezoelectric MEMS Resonant Accelerometer 期刊论文
Journal of Microelectromechanical Systems, 2019, 卷号: 28, 期号: 5, 页码: 776-781
Authors: Jian Yang; Meng Zhang; Chaowei Si; Guowei Han; Jin Ning; Fuhua Yang; Xiaodong Wang
Adobe PDF(2407Kb) | Favorite | View/Download：33/0 | Submit date：2020/08/05 |
| Adaptive EKF Based on HMM Recognizer for Attitude Estimation Using MEMS MARG Sensors 期刊论文
IEEE Sensors Journal, 2018, 卷号: 18, 期号: 8, 页码: 3299-3310
Authors: Xin Tong; Zhaofeng Li; Guowei Han; Nan Liu; Yan Su; Jin Ning; Fuhua Yang
Adobe PDF(1838Kb) | Favorite | View/Download：92/0 | Submit date：2019/11/19 |
| PSPICE Hybrid Modeling and Simulation of Capacitive Micro-Gyroscopes 期刊论文
SENSORS, 2018, 卷号: 18, 期号: 4, 页码: 1006
Authors: Yan Su ; Xin Tong ; Nan Liu ; Guowei Han ; Chaowei Si ; Jin Ning ; Zhaofeng Li ; Fuhua Yang
Adobe PDF(16980Kb) | Favorite | View/Download：74/0 | Submit date：2019/11/12 |
| Design and Simulation of A Novel Piezoelectric AlN-Si Cantilever Gyroscope 期刊论文
MICROMACHINES, 2018, 卷号: 9, 期号: 2, 页码: 81
Authors: Jian Yang ; Chaowei Si ; Fan Yang ; Guowei Han ; Jin Ning ; Fuhua Yang ; Xiaodong Wang
Adobe PDF(1700Kb) | Favorite | View/Download：85/0 | Submit date：2019/11/12 |
| Fabrication of a high performance ZnIn 2 S 4 /Si heterostructure photodetector array for weak signal detection 期刊论文
Journal of Materials Chemistry C, 2018, 卷号: 6, 期号: 47, 页码: 12928-12939
Authors: Zhaoqiang Zheng; Jiandong Yao; Weijia Li; Le Huang; Ye Xiao; Zhongfei Mu; Guowei Yang; Jingbo Li
Adobe PDF(2128Kb) | Favorite | View/Download：55/0 | Submit date：2019/11/15 |
| Tin dioxide quantum dots coupled with graphene for high-performance bulk-silicon Schottky photodetector 期刊论文
Materials Horizons, 2018, 卷号: 5, 期号: 4, 页码: 727-737
Authors: Zhaoqiang Zheng; Jiandong Yao; Lianfeng Zhu; Wei Jiang; Bing Wang; Guowei Yang; Jingbo Li
Adobe PDF(2169Kb) | Favorite | View/Download：43/0 | Submit date：2019/11/12 |
