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Low temperature one-step growth of AlON thin films with homogenous nitrogen doping profile by plasma enhanced atomic layer deposition 期刊论文
ACS Applied Materials & Interfaces, 2017, 卷号: 9, 期号: 44, 页码: 38662-38669
Authors:  Hong-Yan Chen;  Hong-Liang Lu;  Jin-Xin Chen;  Feng Zhang;  Xin-Ming Ji;  Wen-Jun Liu;  Xiao-Feng Yang;  David Wei Zhang
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