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Crystal quality improvement of sputtered AlN film on sapphire substrate by high-temperature annealing 期刊论文
Journal of Materials Science: Materials in Electronics, 2018, 卷号: 29, 期号: 16, 页码: 13766-13773
Authors:  Lu Zhao ;   Kun Yang Yujie Ai ;   Lian Zhang ;   Xiaolong Niu Hongrui Lv ;   Yun Zhang
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