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Mechanical strains in pecvd SiNx:H films for nanophotonic application 期刊论文
Chinese Physics B, 2015, 卷号: 24, 期号: 10, 页码: 106801
Authors:  O. Semenova;  A. Kozelskaya;  Li Zhi-Yong;  Yu Yu-De
Adobe PDF(623Kb)  |  Favorite  |  View/Download:249/1  |  Submit date:2016/03/22
Mechanical strains in pecvd SiNX:H filmsfor nanophotonic application 期刊论文
Chinese Physics B, 2015, 卷号: 24, 期号: 10, 页码: 106801
Authors:  O. Semenova;  A. Kozelskaya;  Li Zhi-Yong;  Yu Yu-De
Adobe PDF(623Kb)  |  Favorite  |  View/Download:863/528  |  Submit date:2016/04/15