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A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS 会议论文
PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208, Cancun, MEXICO, 2011
Authors:  Xie J (Xie J.);  Liu YF (Liu Y. F.);  Zhang ML (Zhang M. L.);  Yang JL (Yang J. L.);  Yang FH (Yang F. H.)
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