SEMI OpenIR

Browse/Search Results:  1-1 of 1 Help

Filters    
Selected(0)Clear Items/Page:    Sort:
The ICP etching technology of 3C-SiC films 会议论文
INTERNATIONAL MEMS CONFERENCE 2006, 34: 511-515 2006, Singapore, SINGAPORE, MAY 09-12, 2006
Authors:  Ning J (Ning Jin);  Gong QC (Gong Quancheng);  Sun GS (Sun Guosheng);  Liu ZL (Liu Zhongli)
Adobe PDF(325Kb)  |  Favorite  |  View/Download:1221/476  |  Submit date:2011/07/14