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Micromechanical Tunable Optical Filter 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 4, 页码: 347-350
Authors:  Zhang Ruikang;  Zhou Zhen;  Huang Yongqing;  Ren Xiaomin;  Yang Xiaohong;  Xu Yingqiang;  Zhang Wei;  Dv Yun;  Niu zhichuan;  Wu Ronghan
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