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A GaAs-Based MOEMS Tunable RCE Photodetector with Single Cantilever Beam 期刊论文
半导体学报, 2005, 卷号: 26, 期号: 6, 页码: 1087-1093
Authors:  Zhou Zhen;  Han Qin;  Du Yun;  Yang Xiaohong;  Wu Ronghan;  Huang Yongqing;  Ren Xiaomin
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