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Fabrication of Silicon Condenser Microphone Using Oxidized Porous Silicon as Sacrificial Layer 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 5, 页码: 449-453
Authors:  Ning Jin;  Liu Zhongli;  Liu Huanzhang;  Ge Yongcai
Adobe PDF(242Kb)  |  Favorite  |  View/Download:821/257  |  Submit date:2010/11/23
电容式微传声器的性能模拟与优化设计 期刊论文
半导体学报, 2003, 卷号: 24, 期号: 8, 页码: 877-881
Authors:  宁瑾;  刘忠立
Adobe PDF(219Kb)  |  Favorite  |  View/Download:786/352  |  Submit date:2010/11/23