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题名: Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors
作者: Li ZY (Li Zhiyong);  Yu JZ (Yu Jinzhong);  Chen SW (Chen Shaowu);  Liu JW (Liu Jingwei)
发表日期: 2006
摘要: Novel folding 8 x 8 matrix switches based on silicon on insulator were demonstrated. In the design, single-mode rib waveguides and multimode interferences are connected by optimized tapered waveguides to reduce the mode coupling loss between the two types of waveguides. The self-aligned method was applied to the key integrated turning mirrors for perfect positions and low loss of them. A mixed etching process including inductively coupled plasma and chemical etching was employed to etch waveguides and mirrors, respectively. The compact size of the device is only 20 x 3.2 mm(2). The switch element with high switching speed and low power consumption is presented in the matrix. The average insertion loss of the matrix is about -21 dB, and the excess loss of one mirror is measured of -1.4 dB. The worst crosstalk is larger than 21 dB. Experimental results illuminate that some of the main characteristics of optical matrix switches are. developed in the modified design, which is in accord with theoretic analyses.
刊名: JOURNAL OF LIGHTWAVE TECHNOLOGY
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Li, ZY (Li, Zhiyong); Yu, JH (Yu, Jinzhong); Chen, SW (Chen, Shaowu); Liu, JW (Liu, Jingwei) .Novel folding 8x8 silicon-based optical matrix switch with tapered waveguides and self-aligned corner mirrors ,JOURNAL OF LIGHTWAVE TECHNOLOGY,DEC 2006,24 (12):5008-5012
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