Knowledge Management System Of Institute of Semiconductors,CAS
碳化硅射频微电子机械系统滤波器的制作方法 | |
赵永梅; 宁 瑾; 孙国胜; 王 亮; 刘兴昉![]() | |
2009-07-01 | |
Rights Holder | 中科院半导体研究所 |
Date Available | 3999 |
Country | 中国 |
Subtype | 发明 |
Application Date | 2007-12-26 |
Language | 中文 |
Status | 公开 |
Application Number | CN200710304222 |
Patent Agent | 汤宝平 |
Document Type | 专利 |
Identifier | http://ir.semi.ac.cn/handle/172111/9090 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 赵永梅,宁 瑾,孙国胜,等. 碳化硅射频微电子机械系统滤波器的制作方法[P]. 2009-07-01. |
Files in This Item: | ||||||
File Name/Size | DocType | Version | Access | License | ||
3480.pdf(713KB) | 限制开放 | -- | Application Full Text |
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