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SEMI OpenIR  > 中国科学院半导体研究所（2009年前）
碳化硅射频微电子机械系统滤波器的制作方法
赵永梅; 宁 瑾; 孙国胜; 王 亮; 刘兴昉; 赵万顺; 王 雷; 李晋闽; 曾一平 
2009-07-01
Rights Holder中科院半导体研究所
Date Available3999
Country中国
Subtype发明
Application Date2007-12-26
Language中文
Status公开
Application NumberCN200710304222
Patent Agent汤宝平
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/9090
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 赵永梅,宁 瑾,孙国胜,等. 碳化硅射频微电子机械系统滤波器的制作方法[P]. 2009-07-01.
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3480.pdf（713KB） 限制开放--Application Full Text
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