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题名: Research progresses of SOI optical waveguide devices and integrated optical switch matrix
作者: Yu JZ;  Chen SW;  Xia JS;  Wang ZT;  Fan ZC;  Li YP;  Liu JW;  Yang D;  Chen YY
发表日期: 2005
摘要: SOI (silicon-on-insulator) is a new material with a lot of important performances such as large index difference, low transmission loss. Fabrication processes for SOI based optoelectronic devices are compatible with conventional IC processes. Having the potential of OEIC monolithic integration, SOI based optoelectronic devices have shown many good characteristics and become more and more attractive recently. In this paper, the recent progresses of SOI waveguide devices in our research group are presented. By highly effective numerical simulation, the single mode conditions for SOI rib waveguides with rectangular and trapezoidal cross-section were accurately investigated. Using both chemical anisotropic wet etching and plasma dry etching techniques, SOI single mode rib waveguide, MMI coupler, VOA (variable optical attenuator), 2X2 thermal-optical switch were successfully designed and fabricated. Based on these, 4X4 and 8X8 SOI optical waveguide integrated switch matrixes are demonstrated for the first time.
刊名: SCIENCE IN CHINA SERIES F-INFORMATION SCIENCES
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Yu, JZ; Chen, SW; Xia, JS; Wang, ZT; Fan, ZC; Li, YP; Liu, JW; Yang, D; Chen, YY .Research progresses of SOI optical waveguide devices and integrated optical switch matrix ,SCIENCE IN CHINA SERIES F-INFORMATION SCIENCES,APR 2005,48 (2):234-246
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