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SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: 1 x 4 Ge-on-SOI PIN Photodetector Array for Parallel Optical Interconnects
作者: Xue CL (Xue Chunlai);  Xue HY (Xue Haiyun);  Cheng BW (Cheng Buwen);  Hu WX (Hu Weixuan);  Yu YD (Yu Yude);  Wang QM (Wang Qiming)
发表日期: 2009
摘要: High-quality Ge film was epitaxially grown on silicon on insulator using the ultrahigh vacuum chemical vapor deposition. In this paper, we demonstrated that the efficient 1 4 germanium-on-silicon p-i-n photodetector arrays with 1.0 mu m Ge film had a responsivity as high as 0.65 A/W at 1.31 mu m and 0.32 A/W at 1.55 mu m, respectively. The dark current density was about 0.75 mA/cm(2) at 0 V and 13.9 mA/cm(2) at 1.0 V reverse bias. The detectors with a diameter of 25 mu m were measured at 1550 nm incident light under 0 V bias, and the result showed that the 3-dB bandwidth is 2.48 GHz. At a reverse bias of 3 V, the bandwidth is about 13.3 GHz. The four devices showed a good consistency.
KOS主题词: Application-specific integrated circuits;  Optical interconnects
刊名: JOURNAL OF LIGHTWAVE TECHNOLOGY
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Xue, CL (Xue, Chunlai); Xue, HY (Xue, Haiyun); Cheng, BW (Cheng, Buwen); Hu, WX (Hu, Weixuan); Yu, YD (Yu, Yude); Wang, QM (Wang, Qiming) .1 x 4 Ge-on-SOI PIN Photodetector Array for Parallel Optical Interconnects ,JOURNAL OF LIGHTWAVE TECHNOLOGY ,DEC 15 2009,27(24):5687-5689
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