SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
Fabrication of high quality two-dimensional photonic crystal mask layer patterns
Peng, YS (Peng, Yin-Sheng); Xu, B (Xu, Bo); Ye, XL (Ye, Xiao-Ling); Niu, JB (Niu, Jie-Bin); Jia, R (Jia, Rui); Wang, ZG (Wang, Zhan-Guo); Peng, YS, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China. 电子邮箱地址: cynthia@semi.ac.cn
2009
Source PublicationOPTICAL AND QUANTUM ELECTRONICS
ISSN0306-8919
Volume41Issue:3Pages:151-158
AbstractThis work discusses the fabrication of two-dimensional photonic crystal mask layer patterns. Photonic crystal patterns having holes with smooth and straight sidewalls are achieved by optimizing electron beam exposure doses during electron beam lithography process. Thereafter, to precisely transfer the patterns from the beam resist to the SiO2 mask layer, we developed a pulse-time etching method and optimize various reaction ion etching conditions. Results show that we can obtain high quality two-dimensional photonic crystal mask layer patterns.
metadata_83[peng, yin-sheng; xu, bo; ye, xiao-ling; wang, zhan-guo] chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china; [niu, jie-bin; jia, rui] chinese acad sci, inst microelect, beijing 100029, peoples r china
KeywordPhotonic Crystal
Subject Area半导体材料
Funding Organization973 Program of China 2006CB604904 National Nature Science Foundation of China 60676029
Indexed BySCI
Language英语
Date Available2010-03-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/7499
Collection中国科学院半导体研究所(2009年前)
Corresponding AuthorPeng, YS, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China. 电子邮箱地址: cynthia@semi.ac.cn
Recommended Citation
GB/T 7714
Peng, YS ,Xu, B ,Ye, XL ,et al. Fabrication of high quality two-dimensional photonic crystal mask layer patterns[J]. OPTICAL AND QUANTUM ELECTRONICS,2009,41(3):151-158.
APA Peng, YS .,Xu, B .,Ye, XL .,Niu, JB .,Jia, R .,...&Peng, YS, Chinese Acad Sci, Inst Semicond, Key Lab Semicond Mat Sci, Beijing 100083, Peoples R China. 电子邮箱地址: cynthia@semi.ac.cn.(2009).Fabrication of high quality two-dimensional photonic crystal mask layer patterns.OPTICAL AND QUANTUM ELECTRONICS,41(3),151-158.
MLA Peng, YS ,et al."Fabrication of high quality two-dimensional photonic crystal mask layer patterns".OPTICAL AND QUANTUM ELECTRONICS 41.3(2009):151-158.
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