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Structural and optical properties of ZnO films on SrTiO3 substrates by MOCVD
Jia CH; Chen YH; Liu GH; Liu XL; Yang SY; Wang ZG; Jia CH Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci POB 912 Beijing 100083 Peoples R China. E-mail Address: yhchen@red.semi.ac.cn
2009
Source PublicationJOURNAL OF PHYSICS D-APPLIED PHYSICS
ISSN0022-3727
Volume42Issue:1Pages:Art. No. 015415
AbstractZnO films have been fabricated on (0 0 1), (0 1 1) and (1 1 1) SrTiO3 (STO) substrates by metal-organic chemical vapour deposition (MOCVD). It is interesting that the ZnO films on (0 0 1) and (0 1 1) STO substrates show polar and semipolar orientations, which are different from previous reports, while the same growing direction of polar ZnO with previous results is found on (1 1 1) STO. For the atomic arrangements, two orthogonal domains and a single domain are observed on (0 0 1) and (1 1 1) STO, respectively. Photoluminescence spectra show that every sample has a sharp near-band-edge emission peak at about 3.28 eV without any deep-level emission band between 1.5 and 2.8 eV, implying a high optical quality. A violet emission around 3.0 eV is observed only in ZnO films on (0 0 1) and (0 1 1) STO substrates grown at 600 degrees C, which is discussed briefly. Additionally, the semipolar ZnO does not weaken the emission efficiency along with the reduction in the polarization effect compared with polar ZnO. These results show that high-quality polar and semipolar ZnO films can be grown on STO substrates by MOCVD.
metadata_83[jia c. h.; chen y. h.; liu g. h.; liu x. l.; yang s. y.; wang z. g.] chinese acad sci inst semicond key lab semicond mat sci beijing 100083 peoples r china
KeywordPulsed-laser Deposition Thin-films Zinc-oxide Photoluminescence Temperature Sapphire Surface Growth
Subject Area半导体材料
Funding Organization973 program 2006CB604908 2006CB921607 National Natural Science Foundation of China 60625402 This work was supported by the 973 program (2006CB604908, 2006CB921607) and the National Natural Science Foundation of China (60625402).
Indexed BySCI
Language英语
Date Available2010-03-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/7475
Collection中国科学院半导体研究所(2009年前)
Corresponding AuthorJia CH Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci POB 912 Beijing 100083 Peoples R China. E-mail Address: yhchen@red.semi.ac.cn
Recommended Citation
GB/T 7714
Jia CH,Chen YH,Liu GH,et al. Structural and optical properties of ZnO films on SrTiO3 substrates by MOCVD[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS,2009,42(1):Art. No. 015415.
APA Jia CH.,Chen YH.,Liu GH.,Liu XL.,Yang SY.,...&Jia CH Chinese Acad Sci Inst Semicond Key Lab Semicond Mat Sci POB 912 Beijing 100083 Peoples R China. E-mail Address: yhchen@red.semi.ac.cn.(2009).Structural and optical properties of ZnO films on SrTiO3 substrates by MOCVD.JOURNAL OF PHYSICS D-APPLIED PHYSICS,42(1),Art. No. 015415.
MLA Jia CH,et al."Structural and optical properties of ZnO films on SrTiO3 substrates by MOCVD".JOURNAL OF PHYSICS D-APPLIED PHYSICS 42.1(2009):Art. No. 015415.
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