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题名: Effect of counterpart on the tribological behavior and tribo-induced phase transformation of Si
作者: Li XC;  Lu JJ;  Yang SR
发表日期: 2009
摘要: The tribological behaviors and phase transformation of single crystal silicon against Si3N4, Ruby and steel were investigated in this study. It was found that the strong chemical action between silicon and Fe was the key factor to the tribological behavior of silicon as slid against steel. SEM and Raman spectroscopy indicated that phase transformation of single crystal silicon occurred during the running-in period at low sliding velocity as slid against Si3N4 and Ruby. and gave birth to single or a mixture phase of Si-III, Si-XII and amorphous silicon. The high hardness of counterpart and the absence of chemical action between silicon and counterpart facilitated the phase transformation of single crystal silicon. (C) 2008 Elsevier Ltd. All rights reserved.
KOS主题词: Phase transition;  COEFFICIENT OF FRICTION;  seizure;  Abrasion resistance
刊名: TRIBOLOGY INTERNATIONAL
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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Li XC ; Lu JJ ; Yang SR .Effect of counterpart on the tribological behavior and tribo-induced phase transformation of Si ,TRIBOLOGY INTERNATIONAL,2009 ,42(5):628-633
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