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题名: Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001)
作者: Fan YM;  Zhang XW;  You JB;  Ying J;  Tan HR;  Chen NF
发表日期: 2009
摘要: Cubic boron nitride (c-BN) films were deposited on Si(001) substrates in an ion beam assisted deposition (IBAD) system under various conditions, and the growth parameter spaces and optical properties of c-BN films have been investigated systematically. The results indicate that suitable ion bombardment is necessary for the growth of c-BN films, and a well defined parameter space can be established by using the P/a-parameter. The refractive index of BN films keeps a constant of 1.8 for the c-BN content lower than 50%, while for c-BN films with higher cubic phase the refractive index increases with the c-BN content from 1.8 at chi(c) = 50% to 2.1 at chi(c) = 90%. Furthermore, the relationship between n and rho for BN films can be described by the Anderson-Schreiber equation, and the overlap field parameter gamma is determined to be 2.05.
KOS主题词: Refractive index;  Ellipsometry;  Nucleation;  diamond;  Density
刊名: CHINESE PHYSICS LETTERS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Fan YM ; Zhang XW ; You JB ; Ying J ; Tan HR ; Chen NF .Growth-Parameter Spaces and Optical Properties of Cubic Boron Nitride Films on Si(001) ,CHINESE PHYSICS LETTERS,2009 ,26(5):Art. No. 056801
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