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题名: Fabrication and optical optimization of spot-size converters with strong cladding layers
作者: Liu Y;  Li Y;  Fan ZC;  Xing B;  Yu YD;  Yu JZ
发表日期: 2009
摘要: A silicon-on-insulator (SOI) optical fiber-to-waveguide spot-size converter (SSC) overlaid with specially treated silica is investigated for integrated optical circuits. Unlike the conventional process of simply depositing the hot silica on silicon waveguides, two successive layers of silicon dioxide were grown on etched SSC structures by PECVD (plasma-enhanced chemical vapor deposition). The two layers have 0.8% index contrast and supply stronger cladding for an incident light beam. Additionally, this process is able to reduce the effective refractive index of the input mode to less than 1.47 (extremely close to that of the fiber), substantially weakening the unwanted back reflection. Exploiting this technology, it was demonstrated that the SSC showed a theoretical low mode mismatch loss of 1.23 dB for a TE-like mode and has an experimental coupling efficiency of 66%.
刊名: JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Liu Y ; Li Y ; Fan ZC ; Xing B ; Yu YD ; Yu JZ .Fabrication and optical optimization of spot-size converters with strong cladding layers ,JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS,2009 ,11(8):Art. No. 085002
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