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题名: Effect of silver growth temperature on the contacts between Ag and ZnO thin films
作者: Li XK;  Li QS;  Liang DC;  Xu YD;  Xie XJ
发表日期: 2009
摘要: Highly c-axis oriented ZnO thin films were deposited on Si substrates by the pulsed laser deposition (PLD) method. At different growth temperatures, 200 nm silver films as the contact metal were deposited on the ZnO thin films. The growth temperatures have great influence on the crystal quality of Ag films. Current-voltage characteristics were measured at room temperature. The Schottky contacts between Ag and ZnO thin films were successfully obtained when silver electrodes were deposited at 150A degrees C and 200A degrees C. Ohmic contacts were formed while the growth temperatures were lower than 150A degrees C or higher than 200A degrees C. After analysis, the forming of Ag/ZnO Schottky contacts was shown to be dependent on the appearance of the p-type inversion layer at the interface between Ag and ZnO layers.
KOS主题词: Schottky barrier;  interface
刊名: SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Li XK ; Li QS ; Liang DC ; Xu YD ; Xie XJ .Effect of silver growth temperature on the contacts between Ag and ZnO thin films ,SCIENCE IN CHINA SERIES E-TECHNOLOGICAL SCIENCES,2009 ,52(9):2779-2784
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