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题名: Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator
作者: Huang QZ;  Yu JZ;  Chen SW;  Xu XJ;  Han WH;  Fan ZC
发表日期: 2008
摘要: A high-performance microring resonator in a silicon-on-insulator rib waveguide is realized by using the electron beam lithography followed by inductively coupled plasma etching. The design and the experimental realization of this device are presented in detail. In addition to improving relevant processes to minimize propagation loss, the coupling efficiency between the ring and the bus is carefully chosen to approach a critical coupling for high performance operating. We have measured a quality factor of 21,200 and an extinction ratio of 12.5dB at a resonant wavelength of 1549.32nm. Meanwhile, a low propagation loss of 0.89dB/mm in a curved waveguide with a bending radius of 40 mu m is demonstrated as well.
刊名: CHINESE PHYSICS B
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Huang, QZ ; Yu, JZ ; Chen, SW ; Xu, XJ ; Han, WH ; Fan, ZC .Design, fabrication and characterization of a high-performance microring resonator in silicon-on-insulator ,CHINESE PHYSICS B,2008 ,17(7): 2562-2566
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