高级检索   注册
SEMI OpenIR  > 中国科学院半导体研究所(2009年前)  > 期刊论文

题名: Fabrication and optical characterization of GaN-based nanopillar light emitting diodes
作者: Zhu, JH;  Zhang, SM;  Sun, X;  Zhao, DG;  Zhu, JJ;  Liu, ZS;  Jiang, DS;  Duan, LH;  Wang, H;  Shi, YS;  Liu, SY;  Yang, H
发表日期: 2008
摘要: InGaN/GaN-multiple-quantum-well-based light emitting diode ( LED) nanopillar arrays with a diameter of approximately 200nm and a height of 700nm are fabricated by inductively coupled plasma etching using Ni self-assembled nanodots as etching mask. In comparison to the as-grown LED sample an enhancement by a factor of four of photoluminescence ( PL) intensity is achieved after the fabrication of nanopillars, and a blue shift and a decrease of full width at half maximum of the PL peak are observed. The method of additional wet etching with different chemical solutions is used to remove the etch-induced damage. The result shows that the dilute HCl ( HCl:H2O=1:1) treatment is the most effective. The PL intensity of nanopillar LEDs after such a treatment is about 3.5 times stronger than that before treatment.
KOS主题词: ICP (inductively coupled plasma methods);  arrays;  Nanostructured materials;  Luminescence;  Nanostructured materials
刊名: CHINESE PHYSICS LETTERS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

条目包含的文件

文件 大小格式
401.pdf1157KbAdobe PDF浏览/下载


许可声明:条目相关作品遵循知识共享协议(Creative Commons)。


推荐引用方式:
Zhu, JH ; Zhang, SM ; Sun, X ; Zhao, DG ; Zhu, JJ ; Liu, ZS ; Jiang, DS ; Duan, LH ; Wang, H ; Shi, YS ; Liu, SY ; Yang, H .Fabrication and optical characterization of GaN-based nanopillar light emitting diodes ,CHINESE PHYSICS LETTERS,2008 ,25(9): 3485-3488
个性服务
 推荐该条目
 保存到收藏夹
 查看访问统计
 Endnote导出
Google Scholar
 Google Scholar中相似的文章
 [Zhu, JH]的文章
 [Zhang, SM]的文章
 [Sun, X]的文章
CSDL跨库检索
 CSDL跨库检索中相似的文章
 [Zhu, JH]的文章
 [Zhang, SM]的文章
 [Sun, X]的文章
Scirus search
 Scirus中相似的文章
Social Bookmarking
  Add to CiteULike  Add to Connotea  Add to Del.icio.us  Add to Digg  Add to Reddit 
所有评论 (0)
暂无评论

除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。

 

 

Valid XHTML 1.0! 版权所有 © 2007-2012  中国科学院半导体研究所  -反馈
系统开发与技术支持:中国科学院国家科学图书馆兰州分馆(信息系统部)
本系统基于 MIT 和 Hewlett-Packard 的 DSpace 软件开发