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题名: Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator
作者: Huang, QZ;  Yu, YD;  Yu, JZ
发表日期: 2009
摘要: in experiment, characteristics of silicon microring/racetrack resonators in submicron rib waveguides have been systematically investigated. It is demonstrated that only a transverse-electric mode is guided for a ratio of slab height to rib height h/H = 0.5. Thus, these microring/racetrack resonators can only function for quasi-transverse-electric mode, while they get rid of transverse-magnetic polarization. Electron beam lithography and inductively coupled plasma etching were employed and improved to reduce side-wall roughness for low propagation loss and high performance resonators. Then, the effects of waveguide dimensions, coupling region design, waveguide roughness, and oxide cladding for the resonators have been considered and analyzed. (C) 2008 Elsevier B.V. All rights reserved.
KOS主题词: Resonators;  semiconductor-insulator boundaries;  electromagnetic wave polarisation
刊名: OPTICS COMMUNICATIONS
专题: 中国科学院半导体研究所(2009年前)_期刊论文

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推荐引用方式:
Huang, QZ ; Yu, YD ; Yu, JZ .Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator ,OPTICS COMMUNICATIONS,2009 ,282(1): 22-26
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