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title: ICP刻蚀技术及其在SOI波导器件制作中的应用
author: 樊中朝
metadata_47: 2004
metadata_33: 博士
Appears in Collections:半导体研究所机构知识库_学位论文

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Recommended Citation:
樊中朝.ICP刻蚀技术及其在SOI波导器件制作中的应用.[博士].北京.中国科学院半导体研究所.2004
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