SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
离子束混合形成金属硅化物和浅结
吴春武
Subtype硕士
Thesis Advisor殷士端
1987
Degree Grantor中国科学院半导体研究所
Place of Conferral北京
Subject Area半导体物理
Language中文
Date Available2009-04-13
Document Type学位论文
Identifierhttp://ir.semi.ac.cn/handle/172111/4459
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
吴春武. 离子束混合形成金属硅化物和浅结[D]. 北京. 中国科学院半导体研究所,1987.
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