SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
在微波、臭氧环境下ITO玻璃的处理方法与装置
曹峻松; 秦大山; 曹国华; 曾一平; 李晋闵
2008-01-30
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-07-27
Language中文
Application Number200610088953
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3955
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
曹峻松,秦大山,曹国华,等. 在微波、臭氧环境下ITO玻璃的处理方法与装置[P]. 2008-01-30.
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