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长波长微机械可调谐滤波器的结构和制作方法
吴旭明; 王小东; 谭满清
2007-10-10
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2006-04-03
Language中文
Application Number200610067135
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3889
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
吴旭明,王小东,谭满清. 长波长微机械可调谐滤波器的结构和制作方法[P]. 2007-10-10.
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