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title: 具有超薄碳化硅中间层的硅基可协变衬底及制备方法
author: 杨少延;  杨霏;  李成明;  范海波;  陈涌海;  刘志凯;  王占国
metadata_47: 2007-8-15
Appears in Collections:半导体研究所机构知识库_专利

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杨少延;杨霏;李成明;范海波;陈涌海;刘志凯;王占国,具有超薄碳化硅中间层的硅基可协变衬底及制备方法,200610003071 ,20060208
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