SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
CMOS电路与MEMS微电极的单片集成化方法
陈弘达; 隋晓红; 裴为华
2007-02-21
Date Available2009-06-04 ; 2009-06-11
Subtype发明
Application Date2005-08-18
Language中文
Application Number200510090644
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/3611
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
陈弘达,隋晓红,裴为华. CMOS电路与MEMS微电极的单片集成化方法[P]. 2007-02-21.
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