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title: 金属有机物化学气相淀积设备反应室中的公转自转机构
author: 刘祥林;  焦春美
metadata_47: 2006-11-22
Appears in Collections:半导体研究所机构知识库_专利

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刘祥林;焦春美,金属有机物化学气相淀积设备反应室中的公转自转机构,200510072924,20050520
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